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Functionalization of Parylene During Its Chemical Vapor Deposition

Abstract

Two possible mechanisms for the reaction of four halogenated (metha)acrylate-based molecules with Parylene [poly (paraxylylene)] during its chemical vapor deposition were proposed. The chemical reactivity of acrylate double bond with the paraxylylene biradical was calculated for all four (metha)acrylate-based molecules. These calculations allowed the evaluation of the energetically favorable mechanism and indeed a direct correlation was found between both predicted and experimental reactivities. Next, the reactivity of the (metha)acrylate-modified Parylene films was evaluated through their reaction with different amines. The obtained amidated Parylene filmswere characterized with X-ray photoelectron spectroscopy, Kaiser test for primary amines, and fluorescence microscopy.The strong reactivity of (metha)acrylate-modified Parylene filmstoward nucleophilic substitution emphasizes a general methodfor the functionalization of self-supported Parylene films grownon the reacting solutions using the novel solid on liquid deposi-tion process. This paves the way to the development of multi-functional materials in a one-step process resulting from the deposition Parylene over liquid patterns. 2011, Wiley Periodicals, Inc. J Polym Sci Part A: Polym Chem 49: 2952­2958, 2011

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Category:
Articles
Type:
artykuł w czasopiśmie wyróżnionym w JCR
Published in:
JOURNAL OF POLYMER SCIENCE PART A-POLYMER CHEMISTRY no. 49, pages 0 - 2958,
ISSN: 0887-624X
Language:
English
Publication year:
2011
Bibliographic description:
Naddaka M., Asen F., Freza S., Bobrowski M., Skurski P., Laux E., Charmet J., Keppner H., Bauer M., Lellouche J.: Functionalization of Parylene During Its Chemical Vapor Deposition// JOURNAL OF POLYMER SCIENCE PART A-POLYMER CHEMISTRY. -Vol. 49, nr. Iss. 13 (2011), s.0-2958
DOI:
Digital Object Identifier (open in new tab) 10.1002/pola.24731
Verified by:
Gdańsk University of Technology

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