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Gas Composition Influence on the Properties of Boron-Doped Diamond Films Deposited on the Fused Silica
Abstract
The main subject of this study are molecular structures and optical properties of boron-doped diamond films with [B]/[C] ppm ratio between 1000 and 10 000, fabricated in two molar ratios of CH 4 -H 2 mixture (1 % and 4 %). Boron-doped diamond (BDD) film on the fused silica was presented as a conductive coating for optical and electronic purposes. The scanning electron microscopy images showed homogenous and polycrystalline surface morphology. The Raman spectroscopy confirmed the growth of sp ³ diamond phase and sp ² carbon phase, both regular and amorphous, on the grain boundaries, as well as the efficiency of boron doping. The sp ³ /sp ² ratio was calculated using the Raman spectra deconvolution method. A high refractive index (in a range of 2.0 to 2.4 at λ = 550 nm) was achieved for BDD films deposited at 700 °C. The values of extinction coefficient were below 1.4 at λ = 550 nm, indicating low absorption of the film
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Authors (8)
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Mirosław Sawczak
- PAN
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- Publication version
- Accepted or Published Version
- DOI:
- Digital Object Identifier (open in new tab) 10.2478/msp-2018-0046
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- Category:
- Articles
- Type:
- artykuł w czasopiśmie wyróżnionym w JCR
- Published in:
-
MATERIALS SCIENCE-POLAND
no. 36,
edition 2,
pages 288 - 296,
ISSN: 0137-1339 - Language:
- English
- Publication year:
- 2018
- Bibliographic description:
- Dec B., Ficek M., Rycewicz M., Macewicz Ł., Gnyba M., Sawczak M., Sobaszek M., Bogdanowicz R.: Gas Composition Influence on the Properties of Boron-Doped Diamond Films Deposited on the Fused Silica// MATERIALS SCIENCE-POLAND. -Vol. 36, iss. 2 (2018), s.288-296
- DOI:
- Digital Object Identifier (open in new tab) 10.2478/msp-2018-0046
- Verified by:
- Gdańsk University of Technology
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