SURFACE AND INTERFACE ANALYSIS - Journal - Bridge of Knowledge

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SURFACE AND INTERFACE ANALYSIS

ISSN:

0142-2421

eISSN:

1096-9918

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(Field of Science):

  • Automation, electronics, electrical engineering and space technologies (Engineering and Technology)
  • Biomedical engineering (Engineering and Technology)
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Catalog Journals

Year 2020
Year 2015
Year 2008
  • Reactive deposition of TiNx layers in a DC-magnetron discharge
    Publication

    - SURFACE AND INTERFACE ANALYSIS - Year 2008

    TiNx layers have been deposited in 'balanced mode' and 'unbalanced mode' of a reactive DC-magnetron plasma (carrier gas argon, reactive gas nitrogen) under different conditions. Discharge power and reactive gas flow have been varied. The layers have been examined by X-ray photoelectron spectroscopy (XPS), X-ray reflectometry (XR), and spectroscopic ellipsometry (SE). The results of the layer analyses were combined with plasma investigations...

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