Interface diffusion between metallic nanoparticles and silicon substrate

Description

Interface diffusion between metallic nanoparticles and silicon substrate was detected by EDX method. Metallic nanostructures were manufactured by thermal annealing of thin films. Gold and silver nanostructures were chosen for measurements. Samples were annealed for 15 and 60 minutes at 550 deg.

Dataset file

EDAX.zip

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CC BY

Attribution
Raw data:: Data contained in dataset was not processed.
Software:: origin

Details

Year of publication:

2021

Verification date:

2021-06-24

Creation date:

2019

Dataset language:

English

Fields of science:

materials engineering (Engineering and Technology)

DOI:

10.34808/e9vb-w015

Verified by:

Gdańsk University of Technology

Keywords

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Authors

Marcin Stanisław Łapiński dr inż.
Instytut Nanotechnologii i Inżynierii Materiałowej
orcid number 0000-0002-3283-2886open in new tab
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