Measurement spectrum obtained with the use of ZnO coated microsphere-based fiber-optic sensor - microsphere inspection s.2 - Open Research Data - MOST Wiedzy

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Measurement spectrum obtained with the use of ZnO coated microsphere-based fiber-optic sensor - microsphere inspection s.2

Description

Application of a microsphere-based fiber-optic sensor with 200 nm zinc oxide (ZnO) coating, deposited by Atomic Layer Deposition (ALD) method, for temperature measurements between 100°C and 300°C, is presented. The main advantage of integrating a fiber-optic microsphere with a sensing device is the possibility of monitoring the integrity of the sensor head in real-time, which allows for higher accuracy during measurements. The study has demonstrated that ZnO ALD coated microsphere-based sensors can be successfully used for temperature measurements. The sensitivity of the tested device was found to be 103.5 nW/°C when the sensor was coupled with a light source of 1300 nm central wavelength. The measured coefficient R2 of the sensor head was over 0.99, indicating a good fit of the theoretical linear model to the measured experimental data.

Dataset file

Microsphere_inspection_s2.zip
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File details

License:
CC BY-NC
Non-commercial

Details

Year of publication:
2021
Verification date:
2021-09-13
Creation date:
2020
Dataset language:
English
Fields of science:
  • Automation, electronic and electrical engineering (Engineering and Technology)
DOI:
DOI ID 10.34808/fba1-3080 open in new tab
Series:
Verified by:
Gdańsk University of Technology

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