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Microcrystalline diamond film evaluation by spectroscopic optical coherence tomography

Abstract

This study has focused on the microcrystalline diamond film (MCD) thickness evaluation. For this purpose, optical coherence tomography (OCT) enhanced by spectroscopic analysis has been used as a method of choice. The average thickness of the tested layer was about 1.5 µm, which is below the standard 2-point OCT resolution. In this case, the usefulness of the spectroscopic analysis was confirmed for the evaluation of the thickness changes in the submicrometer range.

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Keywords

Details

Category:
Articles
Type:
artykuły w czasopismach
Published in:
Photonics Letters of Poland no. 14, pages 50 - 52,
ISSN: 2080-2242
Language:
English
Publication year:
2022
Bibliographic description:
Strąkowska P., Strąkowski M.: Microcrystalline diamond film evaluation by spectroscopic optical coherence tomography// Photonics Letters of Poland -Vol. 14,iss. 3 (2022), s.50-52
DOI:
Digital Object Identifier (open in new tab) 10.4302/plp.v14i3.1156
Sources of funding:
  • Statutory activity/subsidy
Verified by:
Gdańsk University of Technology

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