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Abstract
This study has focused on the microcrystalline diamond film (MCD) thickness evaluation. For this purpose, optical coherence tomography (OCT) enhanced by spectroscopic analysis has been used as a method of choice. The average thickness of the tested layer was about 1.5 µm, which is below the standard 2-point OCT resolution. In this case, the usefulness of the spectroscopic analysis was confirmed for the evaluation of the thickness changes in the submicrometer range.
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- Accepted or Published Version
- DOI:
- Digital Object Identifier (open in new tab) 10.4302/plp.v14i3.1156
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- Category:
- Articles
- Type:
- artykuły w czasopismach
- Published in:
-
Photonics Letters of Poland
no. 14,
pages 50 - 52,
ISSN: 2080-2242 - Language:
- English
- Publication year:
- 2022
- Bibliographic description:
- Strąkowska P., Strąkowski M.: Microcrystalline diamond film evaluation by spectroscopic optical coherence tomography// Photonics Letters of Poland -Vol. 14,iss. 3 (2022), s.50-52
- DOI:
- Digital Object Identifier (open in new tab) 10.4302/plp.v14i3.1156
- Sources of funding:
-
- Statutory activity/subsidy
- Verified by:
- Gdańsk University of Technology
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