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Abstract
In this paper we present results of preliminary research of using nitrogen-doped diamond (NDD) films as reflective layer in Fabry-Pérot interferometer. NDD films were deposited on Si substrates by Microwave Plasma Enhanced Chemical Vapor Deposition (MPECVD) with the use of CH4, H2 and N2 gas mixtures. During deposition process methane flow rate varied while nitrogen flow was constant. We performed series of measurements which showed that NDD can be used as a mirror in Fabry-Pérot interferometer. The best signal visibility and repeatability of measurements were obtained for sample made with 3 sccm methane flow rate.
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Authors (6)
-
Sankaran Kamatchi
- Hasselt University Institute for Materials Research (IMO)
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Ken Haenen
- Hasselt University Institute for Materials Research (IMO)
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Details
- Category:
- Conference activity
- Type:
- materiały konferencyjne indeksowane w Web of Science
- Published in:
-
Proceedings of SPIE
no. 10716,
pages 1 - 6,
ISSN: 0277-786X - Title of issue:
- Saratov Fall Meeting on Optical Technologies in Biophysics and Medicine XIX / 5th International Symposium on Optics and Biophotonics strony 1 - 6
- Language:
- English
- Publication year:
- 2018
- Bibliographic description:
- Kosowska M., Majchrowicz D., Kamatchi S., Ficek M., Szczerska M., Haenen K..: Nitrogen-doped diamond thin films: potential application in Fabry-Pérot interferometer, W: Saratov Fall Meeting on Optical Technologies in Biophysics and Medicine XIX / 5th International Symposium on Optics and Biophotonics, 2018, ,.
- DOI:
- Digital Object Identifier (open in new tab) 10.1117/12.2314445
- Verified by:
- Gdańsk University of Technology
Referenced datasets
- dataset Distance measurement by the low coherent interferometer
- dataset Distance measurement by the low coherent interferometer with NND layer (the source wavelegth 1310 nm)
- dataset Distance measurement with the low coherent interferometer with silver mirror (the source wavelegth 1310 nm) - 20 um (serie 1)
- dataset Distance measurement with the low coherent interferometer with silver mirror (the source wavelegth 1310 nm) - 80 um (serie 1)
- dataset Distance measurement with the low coherent interferometer with silver mirror (the source wavelegth 1310 nm) - 170 um (serie 1)
- dataset Distance measurement with the low coherent interferometer with silver mirror (the source wavelegth 1310 nm) - 140 um (serie 1)
- dataset Distance measurement with the low coherent interferometer with silver mirror (the source wavelegth 1310 nm) - 50 um (serie 1)
- dataset Distance measurement with the low coherent interferometer with silver mirror (the source wavelegth 1310 nm) - 130 um (serie 1)
- dataset Distance measurement with the low coherent interferometer with silver mirror (the source wavelegth 1310 nm) - 120 um (serie 1)
- dataset Distance measurement with the low coherent interferometer with silver mirror (the source wavelegth 1310 nm) - 90 um (serie 1)
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