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Optical properties of boron-doped nanocrystalline diamond films studied by spectroscopic ellipsometry
Abstract
The optical properties of boron-doped nanocrystalline diamond films, coated using Microwave Plasma Enhanced Chemical Vapour Deposition (μPE CVD) system, were analyzed by spectroscopic ellipsometry. Diamond films were deposited on silicon substrates. The ellipsometry data (refractive index (n(λ)), extinction coefficient (k(λ)) were modeled using dedicated software. Evolution of the optical structure with boron doping was observed with wavelength in the range of 258 to 826 nm. The results demonstrated strong shift of optical properties under the influence of boron concentration in the nanocrystalline diamond films.
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- Category:
- Conference activity
- Type:
- publikacja w wydawnictwie zbiorowym recenzowanym (także w materiałach konferencyjnych)
- Title of issue:
- ICT YOUNG 2014 strony 89 - 92
- Language:
- English
- Publication year:
- 2014
- Bibliographic description:
- Milewska D., Bogdanowicz R., Sobaszek M.: Optical properties of boron-doped nanocrystalline diamond films studied by spectroscopic ellipsometry// ICT YOUNG 2014/ : , 2014, s.89-92
- Verified by:
- Gdańsk University of Technology
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