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RAMAN DIAGNOSTICS OF CVD DIAMOND GROWTH

Abstract

Development of Raman spectroscopic system for diagnostics of growth of diamond and BDD (Boron- Doped-Diamond) thin films during μPA CVD (Microwave Plasma Assisted Chemical Vapour Deposition) process is described. Raman studies of such films were carried out as in-situ monitoring of film deposition as ex-situ measurements conducted for a sample outside the reaction vessel after manufacturing process. Modular system for the in-situ monitoring equipped with fibre-optic probes, was designed and tested. Moreover, Raman and optical microscopy were applied after the process for more detailed study of the deposited films. Solid state lasers having wavelength of 532 nm were applied as the excitation sources. The most significant parameters of the deposited films like their molecular composition, presence of defects and rate of the film growth were evaluated.

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Category:
Conference activity
Type:
publikacja w wydawnictwie zbiorowym recenzowanym (także w materiałach konferencyjnych)
Title of issue:
Diagnostyka ramanowska wzrostu cienkich warstw diamentowych metodą CVD strony 1 - 4
Language:
English
Publication year:
2012
Bibliographic description:
Gnyba M.: RAMAN DIAGNOSTICS OF CVD DIAMOND GROWTH// Diagnostyka ramanowska wzrostu cienkich warstw diamentowych metodą CVD/ Busan: International Measurement Confederation, 2012, s.1-4
Bibliography: test
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Gdańsk University of Technology

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