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Spectroscopic Study of Plasma Polymerized a-C:H Films Deposited by a Dielectric Barrier Discharge

Abstract

Plasma polymerized a-C:H thin films have been deposited on Si (100) and aluminum coated glass substrates by a dielectric barrier discharge (DBD) operated at medium pressure using C2Hm/Ar (m = 2, 4, 6) gas mixtures. The deposited films were characterized by Fourier transform infrared reflection absorption spectroscopy (FT-IRRAS), Raman spectroscopy, and ellipsometry. FT-IRRAS revealed the presence of sp3 and sp2 C–H stretching and C–H bending vibrations of bonds in the films. The presence of D and G bands was confirmed by Raman spectroscopy. Thin films obtained from C2H4/Ar and C2H6/Ar gas mixtures have ID/IG ratios of 0.45 and 0.3, respectively. The refractive indices were 2.8 and 3.1 for C2H4/Ar and C2H6/Ar films, respectively, at a photon energy of 2 eV.

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Category:
Articles
Type:
artykuł w czasopiśmie wyróżnionym w JCR
Published in:
Materials no. 9, edition 7, pages 1 - 12,
ISSN: 1996-1944
Language:
English
Publication year:
2016
Bibliographic description:
Chandrashekaraiah T., Bogdanowicz R., Rühl E., Danilov V., Meichsner J., Thierbach S., Hippler R.: Spectroscopic Study of Plasma Polymerized a-C:H Films Deposited by a Dielectric Barrier Discharge// Materials. -Vol. 9, iss. 7 (2016), s.1-12
DOI:
Digital Object Identifier (open in new tab) 10.3390/ma9070594
Verified by:
Gdańsk University of Technology

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