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Abstract
Secondary ion mass spectrometry (SIMS) is a very useful technique for the analysis of layered systems. It is based on the primary ion beam sputtering of solids and mass analysis of the emitted secondary ions. A main limitation of this technique results from the direct quantitative analysis, since the ionization efficiency of a given atom is highly influenced by the neighbouring atoms at the surface. This phenomenon is known as the ‘matrix effect’. This problem can be partially solved by separation of the sputtering and ionization processes. The ‘Storing Matter’ technique involves deposition of the sputtered matter onto a rotating collector. Subsequently, ionisation occurs during the ion beam bombardment of the stored matter. In case of sputtering of a given layered structure, the stored matter deposit presents the sequence of the deposition process and the analysis of this deposit reflects the investigated structure. We analyse a set of on oxidized steel samples and oxidized steel covered by aluminium. These types of structures are known for strong matrix effects at the metal oxide interfaces. The results of the ‘Storing Mater’ analyses are compared with the results of the classical SIMS analysis.
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Authors (4)
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Konarski Piotr dr
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Zawada Aleksander
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Ażgin Joahim
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- Category:
- Articles
- Type:
- artykuł w czasopiśmie wyróżnionym w JCR
- Published in:
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NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
no. 450,
pages 153 - 156,
ISSN: 0168-583X - Language:
- English
- Publication year:
- 2019
- Bibliographic description:
- Miśnik M., Piotr K., Aleksander Z., Joahim A.: Storing Matter’technique in SIMS depth profile analysis// NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS. -Vol. 450, (2019), s.153-156
- DOI:
- Digital Object Identifier (open in new tab) 10.1016/j.nimb.2018.05.017
- Verified by:
- Gdańsk University of Technology
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