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Abstract
This study presents a microsphere-based fiber-optic sensor with a ZnO Atomic Layer Deposition (ALD) coating thickness of 100 nm for temperature measurements. Metrological properties of the sensor were investigated over the temperature range of 100 °C to 300 °C, with a 10 °C step. An interferometric signal is used to control whether the microstructure is whole. Spectrum shift of a reflected signal is used to ascertain changes in the measured parameter. With changing temperature, the peak position of a reflected signal also changes. The R2 coefficient of the presented sensor indicates a good linear fit of over 0.99 to the obtained data. The sensitivity of the sensor investigated in this study equals 0.019 nm/°C.
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Full text
- Publication version
- Accepted or Published Version
- DOI:
- Digital Object Identifier (open in new tab) 10.3390/engproc2020002099
- License
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Details
- Category:
- Articles
- Type:
- artykuły w czasopismach
- Published in:
-
Engineering Proceedings
no. 2,
ISSN: 2673-4591 - Language:
- English
- Publication year:
- 2021
- Bibliographic description:
- Listewnik P.: Temperature Fiber-Optic Sensor with ZnO ALD Coating// Engineering Proceedings -Vol. 2,iss. 1 (2021), s.99-
- DOI:
- Digital Object Identifier (open in new tab) 10.3390/engproc2020002099
- Sources of funding:
-
- Statutory activity/subsidy
- Verified by:
- Gdańsk University of Technology
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