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Temperature Fiber-Optic Sensor with ZnO ALD Coating

Abstract

This study presents a microsphere-based fiber-optic sensor with a ZnO Atomic Layer Deposition (ALD) coating thickness of 100 nm for temperature measurements. Metrological properties of the sensor were investigated over the temperature range of 100 °C to 300 °C, with a 10 °C step. An interferometric signal is used to control whether the microstructure is whole. Spectrum shift of a reflected signal is used to ascertain changes in the measured parameter. With changing temperature, the peak position of a reflected signal also changes. The R2 coefficient of the presented sensor indicates a good linear fit of over 0.99 to the obtained data. The sensitivity of the sensor investigated in this study equals 0.019 nm/°C.

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Publication version
Accepted or Published Version
DOI:
Digital Object Identifier (open in new tab) 10.3390/engproc2020002099
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Creative Commons: CC-BY open in new tab

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Details

Category:
Articles
Type:
artykuły w czasopismach
Published in:
Engineering Proceedings no. 2,
ISSN: 2673-4591
Language:
English
Publication year:
2021
Bibliographic description:
Listewnik P.: Temperature Fiber-Optic Sensor with ZnO ALD Coating// Engineering Proceedings -Vol. 2,iss. 1 (2021), s.99-
DOI:
Digital Object Identifier (open in new tab) 10.3390/engproc2020002099
Sources of funding:
  • Statutory activity/subsidy
Verified by:
Gdańsk University of Technology

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