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Abstract
Optical fiber-based sensors are expected to become key components in the control of industrial processes,and the tuning and the enhancement of their sensing properties are crucial for the further developmentof this technology. Atomic Layer Deposition (ALD), a vapor phase technique allowing for the deposition ofconformal thin films, is particularly suited for the deposition of controllable thin films on challenging sub-strates. In this work, we report the tuning of fiber-optic microsphere sensors using an ALD process of zincoxide (ZnO) based on diethylzinc (DEZ) and H2O at 90◦C. Nanolayers of 50 and 100 nm were deposited onthe fiber-optic microspheres sensors, using 250 and 500 ALD cycles respectively. The fabricated sampleswere characterized using Scanning Electron Microscopy (SEM), and the spectral responses of the deviceswere investigated theoretically and experimentally, by measuring the refractive index of different oils.It has been found that the biocompatible ZnO functional nanocoatings of the fiber-optic microspheresensors allowed for a wider measurement range of refractive indexes, opening up new prospects forfiber-based sensing devices.
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Authors (6)
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Przemysław Struk dr inż
- Silesian University of Technology
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Matthieu Weber
- Institut Européen des Membranes
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Mikhael Bechelany
- Institut Européen des Membranes
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Keywords
Details
- Category:
- Articles
- Type:
- artykuły w czasopismach
- Published in:
-
SENSORS AND ACTUATORS A-PHYSICAL
no. 298,
ISSN: 0924-4247 - Language:
- English
- Publication year:
- 2019
- Bibliographic description:
- Hirsch M., Listewnik P., Struk P., Weber M., Bechelany M., Szczerska M.: ZnO coated fiber optic microsphere sensor for the enhanced refractive index sensing// SENSORS AND ACTUATORS A-PHYSICAL -Vol. 298, (2019), s.111594-
- DOI:
- Digital Object Identifier (open in new tab) 10.1016/j.sna.2019.111594
- Sources of funding:
-
- the French national research agency (ANR, program MeNiNA - ANR-17-CE09-0049), the Polish National Centre for Research and Development (NCBiR) under the project Techmatstrateg Diamsec 347324, DS Programs of the Faculty of Electronics, Telecommunications and Informatics of the Gdansk University of Technology, habilitation grant05/040/RGH18/0025 - Silesian University of Technology Gliwice
- Verified by:
- Gdańsk University of Technology
Referenced datasets
- dataset Measurement spectrum obtained with the use of ZnO coated microsphere-based fiber-optic sensor - 140 Celsius degrees
- dataset Measurement spectrum obtained with the use of ZnO coated (100 nm) microsphere-based fiber-optic sensor - 200 Celsius degrees
- dataset Measurement spectrum obtained with the use of ZnO coated microsphere-based fiber-optic sensor - microsphere inspection s.4
- dataset Measurement spectrum obtained with the use of ZnO coated microsphere-based fiber-optic sensor - 160 Celsius degrees
- dataset Measurement spectrum obtained with the use of ZnO coated microsphere-based fiber-optic sensor - 130 Celsius degrees
- dataset Measurement spectrum obtained with the use of ZnO coated microsphere-based fiber-optic sensor - microsphere inspection s.4
- dataset Measurement spectrum obtained with the use of ZnO coated microsphere-based fiber-optic sensor - 110 Celsius degrees
- dataset Measurement spectrum obtained with the use of ZnO coated microsphere-based fiber-optic sensor - 180 Celsius degrees
- dataset Measurement spectrum obtained with the use of ZnO coated (100 nm) microsphere-based fiber-optic sensor - 100 Celsius degrees
- dataset Measurement spectrum obtained with the use of ZnO coated microsphere-based fiber-optic sensor - 220 Celsius degrees
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