PHASE OBJECT OBSERVATION SYSTEM BASED ON DIFFRACTION PHASE MICROSCOPY
In the paper authors present a special measurement system for observing phase objects. The diffraction phas microscopy makes it possible to measure the dimensions of a tested object with a nanometre resolution. To meet this requirement, it is proposed to apply a spatial transform. The proposed setup can be based either on a two lenses system (called 4 f ) or a Wollaston prism. Both solutions with all construction aspects are described in the paper. To make a full analysis of the object shape the authors developed an accurate image processing algorithm, also presented in the paper.
Sylwia Babicz-Kiewlicz, Barbara Stawarz-Graczyk, Paweł Wierzba. (2018). PHASE OBJECT OBSERVATION SYSTEM BASED ON DIFFRACTION PHASE MICROSCOPY, 25(1), 213-221.
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