PHASE OBJECT OBSERVATION SYSTEM BASED ON DIFFRACTION PHASE MICROSCOPY
In the paper authors present a special measurement system for observing phase objects. The diffraction phas microscopy makes it possible to measure the dimensions of a tested object with a nanometre resolution. To meet this requirement, it is proposed to apply a spatial transform. The proposed setup can be based either on a two lenses system (called 4 f ) or a Wollaston prism. Both solutions with all construction aspects are described in the paper. To make a full analysis of the object shape the authors developed an accurate image processing algorithm, also presented in the paper.
wyświetlono 3 razy