Spatial characterization of H 2: CH 4 dissociation level in microwave ECR plasma source by fibre-optic OES - Publikacja - MOST Wiedzy

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Spatial characterization of H 2: CH 4 dissociation level in microwave ECR plasma source by fibre-optic OES

Abstrakt

Spatially resolved optical emission spectroscopy (SR-OES) was used to investigate microwave activated H2/Ar/CH4 plasma under conditions of the electron cyclotron resonance (ECR). The chemistry and composition of the gas phase were studied using self-designed fibre-optic system with echelle type spectrometer during CVD deposition of polycrystalline diamond. One-dimensional intensity profiles of the main species were collected along the vertical axis of chamber. The dominant species in the flux, originating from excited hydrogen and hydrocarbons, were identified as H, H+, CH and CH+; they are crucial for the diamond deposition process. The effect of ECR on the spatial distribution of H2 and CH4 dissociation profiles was studied in depth. The influence of processing parameters (gas flow rates, input power, pressure and magnetic field level) on species excitation as a function of the distance above substrate was asessed. The obtained data can be used for the ECR system optimization.

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Kategoria:
Publikacja w czasopiśmie
Typ:
artykuł w czasopiśmie wyróżnionym w JCR
Opublikowano w:
The European Physical Journal-Special Topics nr 222, wydanie 9, strony 2223 - 2232,
ISSN: 1951-6355
Język:
angielski
Rok wydania:
2013
Opis bibliograficzny:
Bogdanowicz R., Gołuński Ł., Sobaszek M.: Spatial characterization of H 2: CH 4 dissociation level in microwave ECR plasma source by fibre-optic OES// The European Physical Journal-Special Topics. -Vol. 222, iss. 9 (2013), s.2223-2232
Weryfikacja:
Politechnika Gdańska

wyświetlono 69 razy

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