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Abstrakt
Optical fiber-based sensors are expected to become key components in the control of industrial processes,and the tuning and the enhancement of their sensing properties are crucial for the further developmentof this technology. Atomic Layer Deposition (ALD), a vapor phase technique allowing for the deposition ofconformal thin films, is particularly suited for the deposition of controllable thin films on challenging sub-strates. In this work, we report the tuning of fiber-optic microsphere sensors using an ALD process of zincoxide (ZnO) based on diethylzinc (DEZ) and H2O at 90◦C. Nanolayers of 50 and 100 nm were deposited onthe fiber-optic microspheres sensors, using 250 and 500 ALD cycles respectively. The fabricated sampleswere characterized using Scanning Electron Microscopy (SEM), and the spectral responses of the deviceswere investigated theoretically and experimentally, by measuring the refractive index of different oils.It has been found that the biocompatible ZnO functional nanocoatings of the fiber-optic microspheresensors allowed for a wider measurement range of refractive indexes, opening up new prospects forfiber-based sensing devices.
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Autorzy (6)
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Przemysław Struk dr inż
- Silesian University of Technology
-
Matthieu Weber
- Institut Européen des Membranes
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Mikhael Bechelany
- Institut Européen des Membranes
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Informacje szczegółowe
- Kategoria:
- Publikacja w czasopiśmie
- Typ:
- artykuły w czasopismach
- Opublikowano w:
-
SENSORS AND ACTUATORS A-PHYSICAL
nr 298,
ISSN: 0924-4247 - Język:
- angielski
- Rok wydania:
- 2019
- Opis bibliograficzny:
- Hirsch M., Listewnik P., Struk P., Weber M., Bechelany M., Szczerska M.: ZnO coated fiber optic microsphere sensor for the enhanced refractive index sensing// SENSORS AND ACTUATORS A-PHYSICAL -Vol. 298, (2019), s.111594-
- DOI:
- Cyfrowy identyfikator dokumentu elektronicznego (otwiera się w nowej karcie) 10.1016/j.sna.2019.111594
- Źródła finansowania:
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- the French national research agency (ANR, program MeNiNA - ANR-17-CE09-0049), the Polish National Centre for Research and Development (NCBiR) under the project Techmatstrateg Diamsec 347324, DS Programs of the Faculty of Electronics, Telecommunications and Informatics of the Gdansk University of Technology, habilitation grant05/040/RGH18/0025 - Silesian University of Technology Gliwice
- Weryfikacja:
- Politechnika Gdańska
Powiązane datasety
- dane badawcze Measurement spectrum obtained with the use of ZnO coated microsphere-based fiber-optic sensor - 140 Celsius degrees
- dane badawcze Measurement spectrum obtained with the use of ZnO coated (100 nm) microsphere-based fiber-optic sensor - 200 Celsius degrees
- dane badawcze Measurement spectrum obtained with the use of ZnO coated microsphere-based fiber-optic sensor - 160 Celsius degrees
- dane badawcze Measurement spectrum obtained with the use of ZnO coated microsphere-based fiber-optic sensor - 130 Celsius degrees
- dane badawcze Measurement spectrum obtained with the use of ZnO coated microsphere-based fiber-optic sensor - 180 Celsius degrees
- dane badawcze Measurement spectrum obtained with the use of ZnO coated (100 nm) microsphere-based fiber-optic sensor - 100 Celsius degrees
- dane badawcze Measurement spectrum obtained with the use of ZnO coated microsphere-based fiber-optic sensor - 220 Celsius degrees
- dane badawcze Measurement spectrum obtained with the use of ZnO coated microsphere-based fiber-optic sensor - 200 Celsius degrees
- dane badawcze Measurement spectrum obtained with the use of ZnO coated microsphere-based fiber-optic sensor - microsphere inspection s.5
- dane badawcze Measurement spectrum obtained with the use of ZnO coated microsphere-based fiber-0optic sensor - 250 Celsius degrees
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