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Thin CVD diamond films - synthesis, properties, applications
PublikacjaThe basic model of diamond films growth, in the low pressure synthesis, deposition from the CVD gas phase, is the mixture of hydrocarbon gas in presence with activated hydrogen and its nucleation on the substrate as a result of pyrolysis reaction. It allows to cross the great energetic barrier between graphite and diamond. High pressure and temperature are replaced by change of electronic structure of atoms into gas precursors...
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In-situ optical diagnostics of boron-doped diamond films growth
PublikacjaInterferometry is a desirable method for in-situ measurement of thin, dielectric film growth, as it don't modify conditions of film deposition. Here we present interferometrical measurements of thickness of doped diamond films during Chemical Vapor Deposition (CVD) process. For this purpose we used a semiconductor laser with a 405nm wavelength. Additional ex-situ measurement using spectral interferometry and ellipsometry...
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Studies on optical transmittance of boron-doped nanocrystalline diamond films
PublikacjaThickness is one of the most important parameters in many applications using thin layers. This article describes thickness determination of a boron-doped nanocrystalline diamond (NCD) grown on fused silica glass. A spectroscopic measurement system has been used. A high refractive index (2.3 at 550nm) was achieved for NCD films. The thickness of NCD samples has been determined from the transmission spectrum.
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Diamond surface modification following thermal etching of Si supported hydrogenated diamond films by DBr
PublikacjaZbadano, wykorzystując spektroskopię oscylacyjną (HREELS - High Resolution Electron Energy Loss Spectroscopy) modyfikacje chemiczne powierzchni wodorowanego diamentu, umieszczonego na podkładzie krzemowym i wystawionego na działanie DBr a następnie podgrzanego do temp. powyżej 600 st.K. Przedstawiona procedura powoduje tworzenie się węglika krzemu SiC na powierzchni warstwy diamentowej, co jest widoczne na widmie HREEL jako dwa...
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The use of thin diamond films in fiber optic low-coherence interferometers”
PublikacjaIn this paper we present the use of thin diamond films in fiber-optic low-coherence interferometers. Two kinds of diamond surfaces were used: undoped diamond film and boron-doped diamond film. They were deposited on glass plates as well as silicon layers. A conventionally used mirror was used as a reference layer. Diamond films were deposited using Microwave Plasma Enhanced Chemical Vapour Deposition (μPE CVD) system. Measurements...
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Optical properties of boron-doped nanocrystalline diamond films studied by spectroscopic ellipsometry
PublikacjaThe optical properties of boron-doped nanocrystalline diamond films, coated using Microwave Plasma Enhanced Chemical Vapour Deposition (μPE CVD) system, were analyzed by spectroscopic ellipsometry. Diamond films were deposited on silicon substrates. The ellipsometry data (refractive index (n(λ)), extinction coefficient (k(λ)) were modeled using dedicated software. Evolution of the optical structure with boron doping was observed...
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Nitrogen-incorporated boron-doped diamond films for enhanced electrochemical supercapacitor performance
PublikacjaThe electrochemical (EC) supercapacitor, known for its rapid charging, reliability, and versatile applications, demands optimized electrode characteristics and an understanding of their electrochemical behaviour. Although boron-doped diamond (BDD) holds promise as a supercapacitor electrode, a crucial gap exists in comprehending its material behaviour under specific growth conditions. Here, nitrogen-incorporated BDD (N-BDD) films...
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Incorporation of nitrogen in diamond films – A new way of tuning parameters for optical passive elements
PublikacjaThis paper investigates the impact of nitrogen incorporation in diamond films for the construction of an interferometric sensor to measure displacement. Diamond films with different nitrogen levels (0–5%) were deposited on silicon substrates by microwave plasma enhanced chemical vapor deposition. The structural characteristics of these samples are characterized using scanning electron microscopy (SEM), atomic force microscopy (AFM), confocal...
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Incorporation of nitrogen in diamond films - A new way of tuning parameters for optical passive elements
PublikacjaThis paper investigates the impact of nitrogen incorporation in diamond films for the construction of an interferometric sensor to measure displacement. Diamond films with different nitrogen levels (0–5%) were deposited on silicon substrates by microwave plasma enhanced chemical vapor deposition. The structural characteristics of these samples are characterized using scanning electron microscopy (SEM), atomic force microscopy...
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Enhanced boron doping of thin diamond films grown in deuterium-rich microwave plasma
PublikacjaThe boron-doped diamond thin films were growth in deuterium rich microwave plasma in CVD process. The mechanism of influence of plasma composition on boron doping level was studied using optical emission spectroscopy. Deuterium rich plasma results in an increased dissociation of B2H6 precursor and intense boron-radicals' production. In consequence, a higher doping level of diamond films was observed by means of Laser Induced Breakdown...