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Wyniki wyszukiwania dla: SPEKTROMETRIA MASOWA

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Wyniki wyszukiwania dla: SPEKTROMETRIA MASOWA

  • Reactive deposition of TiNx layers in a DC-magnetron discharge

    Publikacja

    - SURFACE AND INTERFACE ANALYSIS - Rok 2008

    TiNx layers have been deposited in 'balanced mode' and 'unbalanced mode' of a reactive DC-magnetron plasma (carrier gas argon, reactive gas nitrogen) under different conditions. Discharge power and reactive gas flow have been varied. The layers have been examined by X-ray photoelectron spectroscopy (XPS), X-ray reflectometry (XR), and spectroscopic ellipsometry (SE). The results of the layer analyses were combined with plasma investigations...

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