Investigation of the uniformity of TeO2:Eu layer - Open Research Data - MOST Wiedzy

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Investigation of the uniformity of TeO2:Eu layer

Description

TeO2 doped by Eu thin films manufactured by magnetron sputtering method were measured by XPS method.  Te-Eu mosaic target with diameter of 50.8 mm was sputtered for about 45 min in argon-oxygen atmosphere what resulted in 300 nm film thickness deposition. The pressure in the deposition chamber was below 0.2 Pa and substrate was heated  at 200 oC during deposition. The distance between sputtered targets and the Corning 1737 glass substrate was about 10 cm. Uniformity of the film was measured by XPS method with Ar ion gun etching. For analysis etching for 2, 4, 6 and 8 minutes was performed. Results showed good uniformity of film.

Dataset file

Te.opj
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File details

License:
CC BY
Attribution
Raw data:
Data contained in dataset was not processed.
Software:
origin

Details

Year of publication:
2021
Verification date:
2021-07-22
Creation date:
2019
Dataset language:
English
Fields of science:
  • Materials engineering (Engineering and Technology)
DOI:
DOI ID 10.34808/e3yh-0934 open in new tab
Verified by:
Gdańsk University of Technology

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