A spectroscopic study into the decomposition process of titanium isopropoxide in the nitrogen–hydrogen 100kHz low-pressure plasma

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Category:: Magazine publication
Type:: Magazine publication
Published in:: VACUUM no. 82, edition 6, pages 651 - 656,
ISSN: 0042-207X
ISSN:: 0042-207X
Publication year:: 2008
DOI:: Digital Object Identifier (open in new tab) 10.1016/j.vacuum.2007.10.003
Verified by:: No verification

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