Effect of mid-frequency discharge assistance on dual-high power impulse magnetron sputtering - Publication - Bridge of Knowledge

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Effect of mid-frequency discharge assistance on dual-high power impulse magnetron sputtering

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Authors (9)

  • Photo of  Vitezslav Stranak

    Vitezslav Stranak

  • Photo of  Steffen Drache

    Steffen Drache

  • Photo of dr hab. inż. Robert Bogdanowicz

    Robert Bogdanowicz dr hab. inż.

  • Photo of  Harm Wulff

    Harm Wulff

  • Photo of  Ann-Pierra Herrendorf

    Ann-Pierra Herrendorf

  • Photo of  Zdenek Hubicka

    Zdenek Hubicka

  • Photo of  Martin Cada

    Martin Cada

  • Photo of  Milan Tichy

    Milan Tichy

  • Photo of  Rainer Hippler

    Rainer Hippler

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Details

Category:
Magazine publication
Type:
Magazine publication
Published in:
SURFACE & COATINGS TECHNOLOGY no. 206, edition 11-12, pages 2801 - 2809,
ISSN: 0257-8972
ISSN:
0257-8972
Publication year:
2012
DOI:
Digital Object Identifier (open in new tab) 10.1016/j.surfcoat.2011.11.043
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