Growth and properties of Ti-Cu films with respect to plasma parameters in dual-magnetron sputtering discharges

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Category:: Magazine publication
Type:: Magazine publication
Published in:: EUROPEAN PHYSICAL JOURNAL D no. 64, edition 2-3, pages 427 - 435,
ISSN: 1434-6060
ISSN:: 1434-6060
Publication year:: 2011
DOI:: Digital Object Identifier (open in new tab) 10.1140/epjd/e2011-20393-7
Verified by:: No verification

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