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Native-oxide limited cross-plane thermal transport in suspended silicon membranes revealed by scanning thermal microscopy
Abstract
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Authors (6)
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A. Massoud
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J.-M. Bluet
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V. Lacatena
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M. Haras
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J.-F. Robillard
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P.-O. Chapuis
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Details
- Category:
- Magazine publication
- Type:
- Magazine publication
- Published in:
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APPLIED PHYSICS LETTERS
no. 111,
edition 6,
ISSN: 0003-6951 - ISSN:
- 0003-6951
- Publication year:
- 2017
- DOI:
- Digital Object Identifier (open in new tab) 10.1063/1.4997914
- Verified by:
- No verification
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