Optical emission spectroscopy of plasma generated by a waveguide-supplied microwave plasma source operated at 915MHz
Abstract
In this paper we present the results of an optical emission spectroscopic study of an atmospheric pressure microwave (915 MHz) nitrogen and nitrogen with carbon dioxide (1%) plasma at high working gas flow rate. This study was aimed at determining rotational Trot and vibrational Tvib temperatures of N+2 ions and N2, CN molecules. The plasma was generated in a waveguide-supplied cavity-resonant type microwave plasma source. All experimental tests were performed with working gas flow rates QN2 between 80 and 320 l min−1 and a power PA absorbed by the plasma microwave varied from 1.5 to 3kW. The Trot and Tvib temperatures of selected heavy species were determined by comparing the measured and simulated spectra. The measured temperatures of N+2 ions and N2, CN molecules were 6800 to 7500K (±250 K), 5000 to 5200K (±150 K) and 6100 to 6600K (±100 K), respectively, depending on the PA.
Authors (3)
Cite as
Full text
full text is not available in portal
Keywords
Details
- Category:
- Articles
- Type:
- artykuł w czasopiśmie wyróżnionym w JCR
- Published in:
-
PHYSICA SCRIPTA
no. 2014,
pages 1 - 5,
ISSN: 0031-8949 - Language:
- English
- Publication year:
- 2014
- Bibliographic description:
- Miotk R., Jasiński M., Mizeraczyk J.: Optical emission spectroscopy of plasma generated by a waveguide-supplied microwave plasma source operated at 915MHz// PHYSICA SCRIPTA. -Vol. 2014, nr. T161 (2014), s.1-5
- Verified by:
- Gdańsk University of Technology
seen 124 times
Recommended for you
Effect of nitrogen doping on TiOxNy thin film formation at reactive high-power pulsed magnetron sputtering
- V. Stranak,
- M. Quaas,
- R. Bogdanowicz
- + 4 authors