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PHASE OBJECT OBSERVATION SYSTEM BASED ON DIFFRACTION PHASE MICROSCOPY

Abstract

In the paper authors present a special measurement system for observing phase objects. The diffraction phas microscopy makes it possible to measure the dimensions of a tested object with a nanometre resolution. To meet this requirement, it is proposed to apply a spatial transform. The proposed setup can be based either on a two lenses system (called 4 f ) or a Wollaston prism. Both solutions with all construction aspects are described in the paper. To make a full analysis of the object shape the authors developed an accurate image processing algorithm, also presented in the paper.

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Category:
Articles
Type:
artykuł w czasopiśmie wyróżnionym w JCR
Published in:
Metrology and Measurement Systems no. 25, pages 213 - 221,
ISSN: 0860-8229
Language:
English
Publication year:
2018
Bibliographic description:
Babicz-Kiewlicz S., Stawarz-Graczyk B., Wierzba P.: PHASE OBJECT OBSERVATION SYSTEM BASED ON DIFFRACTION PHASE MICROSCOPY// Metrology and Measurement Systems. -Vol. 25, nr. 1 (2018), s.213-221
Bibliography: test
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