Abstract
In this paper we present the use of thin diamond films in fiber-optic low-coherence interferometers. Two kinds of diamond surfaces were used: undoped diamond film and boron-doped diamond film. They were deposited on glass plates as well as silicon layers. A conventionally used mirror was used as a reference layer. Diamond films were deposited using Microwave Plasma Enhanced Chemical Vapour Deposition (μPE CVD) system. Measurements were performed using two superluminescent diodes (SLD) with wavelengths of 1300 mm and 1550 mm. The optimal conditions for each layers were examined: the required wavelength of the light source and the length of Fabry-Perot interferometer cavity. Metrological parameters of Fabry-Perot interferometer with different mirrors were compared. The presented thin diamond films may be an interesting alternative to the commonly used reflective surfaces.
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- Accepted or Published Version
- DOI:
- Digital Object Identifier (open in new tab) 10.1088/1757-899X/104/1/012023
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- Category:
- Conference activity
- Type:
- materiały konferencyjne indeksowane w Web of Science
- Published in:
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IOP Conference Series: Materials Science and Engineering
pages 1 - 5,
ISSN: 1757-8981 - Title of issue:
- 39th International Microelectronics and Packaging IMAPS Poland 2015 Conference strony 1 - 5
- ISSN:
- 1757-8981
- Language:
- English
- Publication year:
- 2015
- Bibliographic description:
- Majchrowicz D., Karpienko K..: The use of thin diamond films in fiber optic low-coherence interferometers”, W: 39th International Microelectronics and Packaging IMAPS Poland 2015 Conference, 2015, IOP PUBLISHING LTD,.
- DOI:
- Digital Object Identifier (open in new tab) 10.1088/1757-899x/104/1/012023
- Verified by:
- Gdańsk University of Technology
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