Ultrasonic spectroscopy of silicon single crystal

Petr Sedlak; Pavel Tofel; Vlasta Sedlakova; Jiri Majzner; Josef Sikula; Lech Hasse

Ultrasonic spectroscopy of silicon single crystal

Abstract

Specimens of Si single crystals with different crystal orientation [100] and [110] were studied by the electro-ultrasonic spectroscopy (EUS) and Resonant Ultrasonic Spectroscopy (RUS). A silicon single crystal is an anisotropic crystal, so its properties are different in different directions in the material relative to the crystal orientation. EUS is based on interaction of two signals: electric AC signal and ultrasonic signal, which are working on different frequencies. The ultrasonic wave affects the electron and ions transport in the structures and the electrical signal created due to the interaction between the ultrasonic wave and charge current carriers is proportional to the density of structure defects. RUS enables to measure natural frequencies of free elastic vibrations of a simply shaped specimens by scanning a selected frequency range including the appropriate resonances of the measured specimens.

Authors (6)

Cite as

Full text

download paper

downloaded 25 times

Publication version: Accepted or Published Version
License: open in new tab

full content of the article see on external site open in new tab

Keywords

Details

Category:: Articles
Type:: artykuł w czasopiśmie wyróżnionym w JCR
Published in:: Metrology and Measurement Systems no. XVIII,
ISSN: 0860-8229
Language:: English
Publication year:: 2011
Bibliographic description:: Sedlak P., Tofel P., Sedlakova V., Majzner J., Sikula J., Hasse L.: Ultrasonic spectroscopy of silicon single crystal// Metrology and Measurement Systems. -Vol. XVIII, nr. No. 4 (2011),
Verified by:: Gdańsk University of Technology