Effect of mid-frequency discharge assistance on dual-high power impulse magnetron sputtering - Publication - Bridge of Knowledge

Effect of mid-frequency discharge assistance on dual-high power impulse magnetron sputtering

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Authors (9)

Vitezslav Stranak
Steffen Drache
Robert Bogdanowicz dr hab. inż.
Harm Wulff
Ann-Pierra Herrendorf
Zdenek Hubicka
Martin Cada
Milan Tichy
Rainer Hippler

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Category:: Magazine publication
Type:: Magazine publication
Published in:: SURFACE & COATINGS TECHNOLOGY no. 206, edition 11-12, pages 2801 - 2809,
ISSN: 0257-8972
ISSN:: 0257-8972
Publication year:: 2012
DOI:: Digital Object Identifier (open in new tab) 10.1016/j.surfcoat.2011.11.043
Verified by:: No verification

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