Ellipsometric data analysis used in on-line metal passivation monitoring - Publication - Bridge of Knowledge

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Ellipsometric data analysis used in on-line metal passivation monitoring

Abstract

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Authors (2)

  • Photo of  R. Bogdanowicz

    R. Bogdanowicz

  • Photo of  J. Ryl

    J. Ryl

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Details

Category:
Magazine publication
Type:
Magazine publication
Published in:
The European Physical Journal-Special Topics no. 144, edition 1, pages 215 - 220,
ISSN: 1951-6355
ISSN:
1951-6355
Publication year:
2007
DOI:
Digital Object Identifier (open in new tab) 10.1140/epjst/e2007-00130-y
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