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Fabrication of Thin-Film Silicon Membranes With Phononic Crystals for Thermal Conductivity Measurements
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Authors (8)
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Valeria Lacatena
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Thierno Bah
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Stanislav Didenko
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Jean-Francois Robillard
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Stephane Monfray
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Thomas Skotnicki
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Emmanuel Dubois
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Details
- Category:
- Magazine publication
- Type:
- Magazine publication
- Published in:
-
IEEE ELECTRON DEVICE LETTERS
no. 37,
edition 10,
pages 1358 - 1361,
ISSN: 0741-3106 - ISSN:
- 0741-3106
- Publication year:
- 2016
- DOI:
- Digital Object Identifier (open in new tab) 10.1109/led.2016.2600590
- Verified by:
- No verification
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