Search results for: SPEKTROMETRIA MASOWA

• Reactive deposition of TiNx layers in a DC-magnetron discharge

  Publication

  • S. Wrehde
  • M. Quaas
  • R. Bogdanowicz
  • S. Hartmut
  • H. Wulff
  • R. Hippler

  - SURFACE AND INTERFACE ANALYSIS - Year 2008

  TiNx layers have been deposited in 'balanced mode' and 'unbalanced mode' of a reactive DC-magnetron plasma (carrier gas argon, reactive gas nitrogen) under different conditions. Discharge power and reactive gas flow have been varied. The layers have been examined by X-ray photoelectron spectroscopy (XPS), X-ray reflectometry (XR), and spectroscopic ellipsometry (SE). The results of the layer analyses were combined with plasma investigations...

  Full text to download in external service