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Investigation of H2:CH4 plasma composition by means of spatially resolved optical spectroscopy
PublicationThe system based on spatially resolved optical emission spectroscopy dedicated for in situ diagnostics of plasma assisted CVD processes is presented in this paper. Measurement system coupled with chemical vapour deposition chamber by dedicated fiber-optic paths enables investigation of spatial distribution of species densities (Hx, H+, CH, CH+) during chemical vapour deposition process. Experiments were performed for a various...
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Enantioselective sensing of (S)-Thalidomide in blood plasma with a chiral naphthalene diimide derivative
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