Structural analysis of the tellurium dioxide thin films

Description

TeO2 thin films were deposited by magnetron sputtering method. After deposition, amorphous samples were annealed at various temperatures. Influence of annealing temperature on a presence of crystalline phase was investigated.

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TeO2.zip

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CC BY

Attribution
Raw data:: Data contained in dataset was not processed.

Details

Year of publication:

2021

Verification date:

2021-06-23

Creation date:

2017

Dataset language:

English

Fields of science:

materials engineering (Engineering and Technology)

DOI:

10.34808/rqzr-sy71

Verified by:

Gdańsk University of Technology

Keywords

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Authors

Marcin Stanisław Łapiński dr hab. inż.
Institute of Nanotechnology and Materials Engineering
orcid number 0000-0002-3283-2886open in new tab
Creator

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