Design and fabrication of nanometer measurement platform for better understanding of silicon mechanical properties - Publication - Bridge of Knowledge

Design and fabrication of nanometer measurement platform for better understanding of silicon mechanical properties

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Authors (4)

Maciej Haras dr inż.
Jean-François Robillard
Thomas Skotnicki
Emmanuel Dubois

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Category:: Magazine publication
Type:: Magazine publication
Published in:: JOURNAL OF APPLIED PHYSICS no. 134, edition 2,
ISSN: 0021-8979
ISSN:: 0021-8979
Publication year:: 2023
DOI:: Digital Object Identifier (open in new tab) 10.1063/5.0152192
Verified by:: No verification

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