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Incorporation of nitrogen in diamond films – A new way of tuning parameters for optical passive elements
Abstract
This paper investigates the impact of nitrogen incorporation in diamond films for the construction of an interferometric sensor to measure displacement. Diamond films with different nitrogen levels (0–5%) were deposited on silicon substrates by microwave plasma enhanced chemical vapor deposition. The structural characteristics of these samples are characterized using scanning electron microscopy (SEM), atomic force microscopy (AFM), confocal micro-Raman spectroscopy, and electron energy loss spectroscopy (EELS). The homogeneous and continuous surface morphology of the films is observed through SEM. In the micro-Raman and electron energy loss spectroscopy studies, it is evident that there is a formation of sp2 -bonded carbon phases due to the increase in the concentration of nitrogen. This investigation gives a strong basis for utilizing these diamond films as reflective layers in fiber-optic devices. The interferometric measurement setup is constructed as a Fabry-P´erot interferometer. The nitrogen incorporated films are proved to be useful as mirrors as they achieve a measurement signal with high contrast. The achieved visibility values for the investigated samples are higher than 94% in the range of 40–100 μm.
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Authors (7)
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Kamatchi J Sankaran
- CSIR-Institute of Minerals and Materials Technology, Bhubaneswar 751013, India
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Ken Haenen
- Institute for Materials Research (IMO), Hasselt University AND IMOMEC, IMEC vzw
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Kishan Dholakia
- SUPA, School of Physics and Astronomy, University of St Andrews
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Details
- Category:
- Articles
- Type:
- artykuły w czasopismach
- Published in:
-
DIAMOND AND RELATED MATERIALS
no. 111,
ISSN: 0925-9635 - Language:
- English
- Publication year:
- 2021
- Bibliographic description:
- Kosowska M., Pawłowska S., Sankaran K. J., Majchrowicz D., Haenen K., Dholakia K., Szczerska M.: Incorporation of nitrogen in diamond films – A new way of tuning parameters for optical passive elements// DIAMOND AND RELATED MATERIALS -Vol. 111, (2021), s.108221-
- DOI:
- Digital Object Identifier (open in new tab) 10.1016/j.diamond.2020.108221
- Sources of funding:
-
- UK Engineering and Physical Sciences Research Council - grant EP/P030017/1
- Research Foundation Flanders (FWO) via Research Project G0D4920N
- Politechnika Gdańska - COMBATING CORONAVIRUS - EIRU program 11/2020/IDUB/I.3/CC
- Statutory activity/subsidy
- Narodowa Agencja Wymiany Akademickiej NAWA - Program Iwanowskiej PPN/IWA/2018/1/ 00058/U/0001
- Narodowa Agencja Wymiany Akademickiej NAWA - Program Iwanowskiej PPN/IWA/2018/ 00026/U/00001
- Narodowe Centrum Nauki - Preludium 2017/25/N/ST7/01610
- Verified by:
- Gdańsk University of Technology
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