Plasma diagnostics of low pressure high power impulse magnetron sputtering assisted by electron cyclotron wave resonance plasma - Publication - Bridge of Knowledge

Plasma diagnostics of low pressure high power impulse magnetron sputtering assisted by electron cyclotron wave resonance plasma

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Authors (8)

Vitezslav Stranak
Ann-Pierra Herrendorf
Steffen Drache
Martin Cada
Zdenek Hubicka
Robert Bogdanowicz dr hab. inż.
Milan Tichy
Rainer Hippler

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Details

Category:: Magazine publication
Type:: Magazine publication
Published in:: JOURNAL OF APPLIED PHYSICS no. 112, edition 9,
ISSN: 0021-8979
ISSN:: 0021-8979
Publication year:: 2012
DOI:: Digital Object Identifier (open in new tab) 10.1063/1.4764102
Verified by:: No verification

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