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Preparation and Characterization of Microsphere ZnO ALD Coating Dedicated for the Fiber-Optic Refractive Index Sensor
Abstract
We report the fabrication of a novel fiber-optic sensor device, based on the use of a microsphere conformally coated with a thin layer of zinc oxide (ZnO) by atomic layer deposition (ALD), and its use as a refractive index sensor. The microsphere was prepared on the tip of a single-mode optical fiber, on which a conformal ZnO thin film of 200 nm was deposited using an ALD process based on diethyl zinc (DEZ) and water at 100 °C. The modified fiber-optic microsphere was examined using scanning electron microscopy and Raman spectroscopy. Theoretical modeling has been carried out to assess the structure performance, and the performed experimental measurements carried out confirmed the enhanced sensing abilities when the microsphere was coated with a ZnO layer. The fabricated refractive index sensor was operating in a reflective mode of a Fabry–Pérot configuration, using a low coherent measurement system. The application of the ALD ZnO coating enabled for a better measurement of the refractive index of samples in the range of the refractive index allowed by the optical fiber. The proof-of-concept results presented in this work open prospects for the sensing community and will promote the use of fiber-optic sensing technologies.
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Authors (6)
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Przemysław Struk dr inż
- Politechnika Śląska w Gliwicach, Wydział Elektryczny Katedra Optoelektroniki
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Matthieu Weber
- Univ. Montpellier Institut Européen des Membranes
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Mikhael Bechelany
- Univ. Montpellier Institut Européen des Membranes
Cite as
Full text
- Publication version
- Accepted or Published Version
- DOI:
- Digital Object Identifier (open in new tab) 10.3390/nano9020306
- License
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Details
- Category:
- Articles
- Type:
- artykuł w czasopiśmie wyróżnionym w JCR
- Published in:
-
Nanomaterials
no. 9,
ISSN: 2079-4991 - Language:
- English
- Publication year:
- 2019
- Bibliographic description:
- Listewnik P., Hirsch M., Struk P., Weber M., Bechelany M., Szczerska M.: Preparation and Characterization of Microsphere ZnO ALD Coating Dedicated for the Fiber-Optic Refractive Index Sensor// Nanomaterials. -Vol. 9, iss. 2 (2019), s.306-
- DOI:
- Digital Object Identifier (open in new tab) 10.3390/nano9020306
- Sources of funding:
-
- The authors M.W. and M.B. want to thank the French national research agency (ANR, program MeNiNA—ANR-17-CE09-0049) for funding. The authors P.L., M.H. and M.J.-S. acknowledge the financial support by the Polish National Centre for Research and Development (NCBiR) under the project Techmatstrateg Diamsec 347324 and DS Programs of the Faculty of Electronics, Telecommunications and Informatics of the Gdańsk University of Technology. P.S. The research was partially financed by habilitation grant 05/040/RGH18/0025—Silesian University of Technology Gliwice.
- Verified by:
- Gdańsk University of Technology
Referenced datasets
- dataset Measurement spectrum obtained with the use of ZnO coated microsphere-based fiber-optic sensor - 140 Celsius degrees
- dataset Measurement spectrum obtained with the use of ZnO coated (100 nm) microsphere-based fiber-optic sensor - 200 Celsius degrees
- dataset Measurement spectrum obtained with the use of ZnO coated microsphere-based fiber-optic sensor - microsphere inspection s.4
- dataset Measurement spectrum obtained with the use of ZnO coated microsphere-based fiber-optic sensor - 160 Celsius degrees
- dataset Measurement spectrum obtained with the use of ZnO coated microsphere-based fiber-optic sensor - 130 Celsius degrees
- dataset Measurement spectrum obtained with the use of ZnO coated microsphere-based fiber-optic sensor - microsphere inspection s.4
- dataset Measurement spectrum obtained with the use of ZnO coated microsphere-based fiber-optic sensor - 110 Celsius degrees
- dataset Measurement spectrum obtained with the use of ZnO coated microsphere-based fiber-optic sensor - 180 Celsius degrees
- dataset Measurement spectrum obtained with the use of ZnO coated (100 nm) microsphere-based fiber-optic sensor - 100 Celsius degrees
- dataset Measurement spectrum obtained with the use of ZnO coated microsphere-based fiber-optic sensor - 220 Celsius degrees
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