Measurement spectrum obtained with the use of ZnO coated microsphere-based fiber-optic sensor - microsphere inspection s.5 - Open Research Data - Bridge of Knowledge

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Measurement spectrum obtained with the use of ZnO coated microsphere-based fiber-optic sensor - microsphere inspection s.5

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Description

Application of a microsphere-based fiber-optic sensor with 200 nm zinc oxide (ZnO) coating, deposited by Atomic Layer Deposition (ALD) method, for temperature measurements between 100°C and 300°C, is presented. The main advantage of integrating a fiber-optic microsphere with a sensing device is the possibility of monitoring the integrity of the sensor head in real-time, which allows for higher accuracy during measurements. The study has demonstrated that ZnO ALD-coated microsphere-based sensors can be successfully used for temperature measurements. The sensitivity of the tested device was found to be 103.5 nW/°C when the sensor was coupled with a light source of 1300 nm central wavelength. The measured coefficient R2 of the sensor head was over 0.99, indicating a good fit of the theoretical linear model to the measured experimental data.

The dataset consists of SEM images of the microsphere. The inspection of the microsphere dimension and quality of the surface is obligatory before the ZnO ALD coating.

Dataset file

Microsphere_inspection_s5.zip
343.8 MB, S3 ETag 66a9f74e11554cf83e75f996b3e8498d-1, downloads: 80
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download file Microsphere_inspection_s5.zip

File details

License:
Creative Commons: by-nc 4.0 open in new tab
CC BY-NC
Non-commercial
Raw data:
Data contained in dataset was not processed.

Details

Year of publication:
2021
Verification date:
2021-10-18
Creation date:
2021
Dataset language:
English
Fields of science:
  • Automation, electronic and electrical engineering (Engineering and Technology)
DOI:
DOI ID 10.34808/nsay-b412 open in new tab
Series:
Verified by:
Gdańsk University of Technology

Keywords

References

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