The surface of a fragment of the structure of an integrated circuit in the semi-contact mode.

Description

The surface of a fragment of the structure of an integrated circuit. Topographic measurements in the semi-contact mode. NTEGRA Prima (NT-MDT) device. NSG 01 probe.

The quality of production of the elements forming the structure of the integrated circuit is crucial for the further development and miniaturization of modern electronic equipment. Atomic force microscopy can be used as one of the techniques for monitoring the accuracy of microcircuit fabrication. It allows, for example, the detection of factory defects consisting in the shortening of the paths, or the assessment of their width and mutual position, determining the size of the parasitic effects. The data provided clearly indicate a sufficient resolution of the imaging variant used. Visible defects in the structure of the imaged elements result from the fact that they were not obtained from the production line, but by destructive disassembly of the commercial processors. The file contains 12 images.

Dataset file

Set4.mdt

1.3 MB, S3 ETag b4b4a84e27c26b953ee23b7677920080-1, downloads: 5

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CC BY-NC

Non-commercial
Software:: Gwyddion

Details

Year of publication:

2021

Verification date:

2021-04-29

Dataset language:

English

Fields of science:

chemical sciences (Natural sciences)

DOI:

10.34808/eyx5-5f67

Series:

Scanning Probe Microscopies data

Verified by:

Gdańsk University of Technology

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