A spectroscopic study into the decomposition process of titanium isopropoxide in the nitrogen–hydrogen 100kHz low-pressure plasma - Publication - MOST Wiedzy

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A spectroscopic study into the decomposition process of titanium isopropoxide in the nitrogen–hydrogen 100kHz low-pressure plasma

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Category:
Magazine publication
Type:
Magazine publication
Published in:
VACUUM no. 82, edition 6, pages 651 - 656,
ISSN: 0042-207X
ISSN:
0042-207X
Publication year:
2008
DOI:
Digital Object Identifier (open in new tab) 10.1016/j.vacuum.2007.10.003
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