Dynamic Study of Dual High-Power Impulse Magnetron Sputtering Discharge by Optical Emission Imaging - Publication - Bridge of Knowledge

Dynamic Study of Dual High-Power Impulse Magnetron Sputtering Discharge by Optical Emission Imaging

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Authors (6)

V. Stranak
R. Bogdanowicz
S. Drache
M. Cada
Z. Hubicka
R. Hippler

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Category:: Magazine publication
Type:: Magazine publication
Published in:: IEEE TRANSACTIONS ON PLASMA SCIENCE no. 39, edition 11, pages 2454 - 2455,
ISSN: 0093-3813
ISSN:: 0093-3813
Publication year:: 2011
DOI:: Digital Object Identifier (open in new tab) 10.1109/tps.2011.2155674
Verified by:: No verification

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