Dynamic Study of Dual High-Power Impulse Magnetron Sputtering Discharge by Optical Emission Imaging - Publication - Bridge of Knowledge

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Dynamic Study of Dual High-Power Impulse Magnetron Sputtering Discharge by Optical Emission Imaging

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Authors (6)

  • Photo of  V. Stranak

    V. Stranak

  • Photo of  R. Bogdanowicz

    R. Bogdanowicz

  • Photo of  S. Drache

    S. Drache

  • Photo of  M. Cada

    M. Cada

  • Photo of  Z. Hubicka

    Z. Hubicka

  • Photo of  R. Hippler

    R. Hippler

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Details

Category:
Magazine publication
Type:
Magazine publication
Published in:
IEEE TRANSACTIONS ON PLASMA SCIENCE no. 39, edition 11, pages 2454 - 2455,
ISSN: 0093-3813
ISSN:
0093-3813
Publication year:
2011
DOI:
Digital Object Identifier (open in new tab) 10.1109/tps.2011.2155674
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