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Effect of nitrogen doping on TiOxNythin film formation at reactive high-power pulsed magnetron sputtering
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Authors (8)
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Vitezslav Stranak
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Marion Quaas
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Hartmut Steffen
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Harm Wulff
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Zdenek Hubicka
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Milan Tichy
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Rainer Hippler
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Details
- Category:
- Magazine publication
- Type:
- Magazine publication
- Published in:
-
JOURNAL OF PHYSICS D-APPLIED PHYSICS
no. 43,
edition 28,
ISSN: 0022-3727 - ISSN:
- 0022-3727
- Publication year:
- 2010
- DOI:
- Digital Object Identifier (open in new tab) 10.1088/0022-3727/43/28/285203
- Verified by:
- No verification
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