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Growth and properties of Ti-Cu films with respect to plasma parameters in dual-magnetron sputtering discharges
Abstract
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Authors (8)
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V. Stranak
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H. Wulff
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R. Bogdanowicz
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S. Drache
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Z. Hubicka
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M. Cada
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M. Tichy
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R. Hippler
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Details
- Category:
- Magazine publication
- Type:
- Magazine publication
- Published in:
-
EUROPEAN PHYSICAL JOURNAL D
no. 64,
edition 2-3,
pages 427 - 435,
ISSN: 1434-6060 - ISSN:
- 1434-6060
- Publication year:
- 2011
- DOI:
- Digital Object Identifier (open in new tab) 10.1140/epjd/e2011-20393-7
- Verified by:
- No verification
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