Phononic engineering of silicon using “dots on the fly” e-beam lithography and plasma etching - Publication - Bridge of Knowledge

Phononic engineering of silicon using “dots on the fly” e-beam lithography and plasma etching

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Authors (5)

S. Monfray
Valeria Lacatena
Jean-Frnacois Robillard
Thomas Skotnicki
Emmanuel Dubois

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Details

Category:: Magazine publication
Type:: Magazine publication
Published in:: MICROELECTRONIC ENGINEERING no. 121, pages 131 - 134,
ISSN: 0167-9317
ISSN:: 01679317
Publication year:: 2014
DOI:: Digital Object Identifier (open in new tab) 10.1016/j.mee.2014.04.034
Verified by:: No verification

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