Plasma diagnostics of low pressure high power impulse magnetron sputtering assisted by electron cyclotron wave resonance plasma - Publication - Bridge of Knowledge

Plasma diagnostics of low pressure high power impulse magnetron sputtering assisted by electron cyclotron wave resonance plasma

Abstract

Citations

1 8

CrossRef
0

Web of Science
2 1

Scopus

Authors (8)

Vitezslav Stranak
Ann-Pierra Herrendorf
Steffen Drache
Martin Cada
Zdenek Hubicka
Robert Bogdanowicz dr hab. inż.
Milan Tichy
Rainer Hippler

Cite as

Full text

full text is not available in portal

full content of the article see on external site open in new tab

Details

Category:: Magazine publication
Type:: Magazine publication
Published in:: JOURNAL OF APPLIED PHYSICS no. 112, edition 9,
ISSN: 0021-8979
ISSN:: 0021-8979
Publication year:: 2012
DOI:: Digital Object Identifier (open in new tab) 10.1063/1.4764102
Verified by:: No verification

seen 110 times