The impact of atomic layer deposition technological parameters on optical properties and morphology of Al 2 O 3 thin films - Publication - Bridge of Knowledge

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The impact of atomic layer deposition technological parameters on optical properties and morphology of Al 2 O 3 thin films

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Category:
Magazine publication
Type:
Magazine publication
Published in:
OPTICA APPLICATA
ISSN: 0078-5466
Publication year:
2015
DOI:
Digital Object Identifier (open in new tab) 10.5277/oa150412
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