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The impact of atomic layer deposition technological parameters on optical properties and morphology of Al 2 O 3 thin films
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- Category:
- Magazine publication
- Type:
- Magazine publication
- Published in:
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OPTICA APPLICATA
ISSN: 0078-5466 - Publication year:
- 2015
- DOI:
- Digital Object Identifier (open in new tab) 10.5277/oa150412
- Verified by:
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