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- 2021
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- Gdańsk University of Technology
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Search results for: MICROELECTROMECHANICAL SYSTEMS

Silicon microcantilever with impedance sensor
Open Research Data
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- A. Zieliński
- J. Ryl
- series: Scanning Probe Microscopies data
The issue of microelectromechanical systems (MEMS) [1] has been enjoying popularity and interest since the 90s of the 20th century. Microcells are one of the simplest devices of this type, but they can be widely used in sensors. There are reports on the possibility of using this type of sensors in the context of such important issues as diagnostics...

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