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Technologia biomems - przegląd zastosowań
Publication
- M. Łukaszewicz
- A. Czyżewski
- Year 2012
The paper reviews the issues related to technology, MEMS (Micro-Electro Systems-Mechanical) in the context of applications in biotechnology and biomedical systems. Systems of this type, with applications in biology and medicine, have the name of our common BioMEMS systems. This pertains to a wide range of technology BioMEMS. The aim of this study is to determine future medical MEMS microphones with particular emphasis on their...