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Measurement spectrum obtained with the use of ZnO coated microsphere-based fiber-optic sensor - microsphere inspection s.4
Description
Application of a microsphere-based fiber-optic sensor with 200 nm zinc oxide (ZnO) coating, deposited by Atomic Layer Deposition (ALD) method, for temperature measurements between 100°C and 300°C, is presented. The main advantage of integrating a fiber-optic microsphere with a sensing device is the possibility of monitoring the integrity of the sensor head in real-time, which allows for higher accuracy during measurements. The study has demonstrated that ZnO ALD-coated microsphere-based sensors can be successfully used for temperature measurements. The sensitivity of the tested device was found to be 103.5 nW/°C when the sensor was coupled with a light source of 1300 nm central wavelength. The measured coefficient R2 of the sensor head was over 0.99, indicating a good fit of the theoretical linear model to the measured experimental data.
The dataset consists of SEM images of the microsphere. The inspection of the microsphere dimension and quality of the surface is obligatory before the ZnO ALD coating.
Dataset file
hexmd5(md5(part1)+md5(part2)+...)-{parts_count} where a single part of the file is 512 MB in size.Example script for calculation:
https://github.com/antespi/s3md5
File details
- License:
-
open in new tab
CC BY-NCNon-commercial - Raw data:
- Data contained in dataset was not processed.
Details
- Year of publication:
- 2021
- Verification date:
- 2021-10-18
- Creation date:
- 2021
- Dataset language:
- English
- Fields of science:
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- Automation, electronic and electrical engineering (Engineering and Technology)
- DOI:
- DOI ID 10.34808/3her-zc68 open in new tab
- Series:
- Verified by:
- Gdańsk University of Technology
Keywords
References
- publication ALD thin ZnO layer as an active medium in a fiber-optic Fabry–Perot interferometer
- publication ZnO ALD-Coated Microsphere-Based Sensors for Temperature Measurements
- publication Preparation and Characterization of Microsphere ZnO ALD Coating Dedicated for the Fiber-Optic Refractive Index Sensor
- publication ZnO coated fiber optic microsphere sensor for the enhanced refractive index sensing
- dataset Measurement spectrum obtained with the use of ZnO coated microsphere-based fiber-optic sensor - 100 Celsius degrees
- dataset Measurement spectrum obtained with the use of ZnO coated microsphere-based fiber-optic sensor - 110 Celsius degrees
- dataset Measurement spectrum obtained with the use of ZnO coated microsphere-based fiber-optic sensor - 120 Celsius degrees
- dataset Measurement spectrum obtained with the use of ZnO coated microsphere-based fiber-optic sensor - 130 Celsius degrees
- dataset Measurement spectrum obtained with the use of ZnO coated microsphere-based fiber-optic sensor - 140 Celsius degrees
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Version this document has several versions
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version 1.2release date 2021-10-18
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Current versionversion 1.1release date 2021-10-18
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version 1.0release date 2021-09-13
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