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Measurement spectrum obtained with the use of ZnO coated microsphere-based fiber-optic sensor - microsphere inspection s.1
Description
Application of a microsphere-based fiber-optic sensor with 200 nm zinc oxide (ZnO) coating, deposited by Atomic Layer Deposition (ALD) method, for temperature measurements between 100°C and 300°C, is presented. The main advantage of integrating a fiber-optic microsphere with a sensing device is the possibility of monitoring the integrity of the sensor head in real-time, which allows for higher accuracy during measurements. The study has demonstrated that ZnO ALD coated microsphere-based sensors can be successfully used for temperature measurements. The sensitivity of the tested device was found to be 103.5 nW/°C when the sensor was coupled with a light source of 1300 nm central wavelength. The measured coefficient R2 of the sensor head was over 0.99, indicating a good fit of the theoretical linear model to the measured experimental data.
Dataset file
hexmd5(md5(part1)+md5(part2)+...)-{parts_count} where a single part of the file is 512 MB in size.Example script for calculation:
https://github.com/antespi/s3md5
File details
- License:
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open in new tab
CC BY-NCNon-commercial - Raw data:
- Data contained in dataset was not processed.
Details
- Year of publication:
- 2021
- Verification date:
- 2021-09-13
- Creation date:
- 2020
- Dataset language:
- Chinese
- Fields of science:
-
- Automation, electronic and electrical engineering (Engineering and Technology)
- DOI:
- DOI ID 10.34808/afem-j720 open in new tab
- Series:
- Verified by:
- Gdańsk University of Technology
Keywords
References
- publication ALD thin ZnO layer as an active medium in a fiber-optic Fabry–Perot interferometer
- publication ZnO ALD-Coated Microsphere-Based Sensors for Temperature Measurements
- publication Preparation and Characterization of Microsphere ZnO ALD Coating Dedicated for the Fiber-Optic Refractive Index Sensor
- publication ZnO coated fiber optic microsphere sensor for the enhanced refractive index sensing
- dataset Measurement spectrum obtained with the use of ZnO coated microsphere-based fiber-optic sensor - 100 Celsius degrees
- dataset Measurement spectrum obtained with the use of ZnO coated microsphere-based fiber-optic sensor - 110 Celsius degrees
- dataset Measurement spectrum obtained with the use of ZnO coated microsphere-based fiber-optic sensor - 120 Celsius degrees
- dataset Measurement spectrum obtained with the use of ZnO coated microsphere-based fiber-optic sensor - 130 Celsius degrees
- dataset Measurement spectrum obtained with the use of ZnO coated microsphere-based fiber-optic sensor - 140 Celsius degrees
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